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Products Invantest
 
  Real-time control
  Yield monitoring
  Setup management
  Superior retest options
  Multi-die features
  Sample probing
 
 
 
  Advanced Test Station Controller for Wafer Test

Integrator is the smart test station control solution that offers superior real-time, die-by-die control and monitoring of the test process. Regardless of the tester and prober model, Integrator can give you the advanced features and data integrity you need to support your special test methodologies.

   
  Real-time control
 
 

Control the prober and tester on a die-by-die basis, allowing ultimate flexibility and providing immediate notification of any testing problems.

  Limit total touchdowns per die to control pad damage.
  Avoid die found to be defective during upstream inspections.
  Resume testing after interruptions where you left off, no wasted retest..
  Custom applications can be driven by die-level, wafer-level, or lot-level events.
  Updates the current status of all systems to the central floor manager / viewer.
  Manual stepping and testing control right from the Integrator screen
   
  Yield Monitoring
 
 

Consecutive Fail and Bin monitors report test problems early, reducing rework and yield loss.

  Overall yield monitor with control chart clearly identifies low-yielding wafers
  Yield monitors can trigger stop/alarm or automatic probe clean and retest.
   
  Setup management
 
 

Automatically downloads setup parameters to the prober and can even load the test program, reducing operator error and improving process consistency.

  Retrieves setup data from a central repository of setup files.
  Allows the user to choose a subset of wafers from a lot for testing
  Lot setup screen can be modified to add custom data entry fields - custom data is saved with results
  Can automatically set Z-height, dramatically reducing operator-induced probe card crashes.
  Monitors probe card planarity and rejects out-of-spec cards.
   
  Superior retest options
 

Multiple Test passes - ideal for offline inking, and retesting of specific bins. Passes can also be used to collect results from off-line inspection tools

  Sub-pass retest - Besides using a subsequent test pass, Integrator can retest specific bins after the wafer completes, before unloading the wafer, as part of a single pass
  Inline retest - Specific bins are immediately retested before the stage indexes to the next die, reducing stepping time and giving instant recovery information
   
  Multi-die features
 

Intelligent tiling algorithm calculates the minimum number of touchdowns for any probecard layout

  Each DUT site is monitored separately for yield during multi-die probing. Yield deltas between sites can be monitored.
  Probecard layout can be user-defined for maximum flexibility
   
  Sample probing
 

Sample probe can test a sample die pattern instead of all testable die, saving test time on high-yielding devices. The pattern is easily configured in the control map editor

  Forced Test of edge die is also optional, forcing selected edge die to be tested even when the sample yield exceeds the minimum.
  Sample test by wafer - used when you want to 100% test specific wafers in a lot while sampling the rest.
   
  Data Management
 

Keeps complete wafer test history in a single file for each wafer - no lost data

  Stores retest data in separate section - all test results are available, never overwritten
  Export maps to SEMI G81/G85 XML format, other custom formats available
   
  Comprehensive solution
 

Designed to control most of today's testers and probers.

  Common data file formats for all test cells, regardless of prober and tester models.
  Common simple graphical user interface for all test cells, regardless of prober and tester models.
   
   
   
   
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